Product details : SMC XGT223-46236-1F HIGH VACUUM VALVE
Series XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.
Strengths
Gasket with wiper: protection of bellows
Rubber cushions for opening and closing: impact absorption
End lock mechanism
Service life of two million cycles