SMC XLAV-16G-2M9//-5G-Q HIGH VACUUM ANGLE VALVE

XLAV-2, Aluminium High Vacuum Angle Valve, Normally Closed/Bellows Seal with Solenoid Valve

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References

SMC:XLAV-16G-2M9//-5G-Q
Rubix:393A3299
Manufacturer :XLAV-16G-2M9//-5G-Q
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Technical specifications

Typexlav-2, aluminium high vacuum angle valve, normally closed/bellows seal with solenoid valve

Documents

Product details : SMC XLAV-16G-2M9//-5G-Q HIGH VACUUM ANGLE VALVE

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

Strengths

Single acting, Bellows seal. With Solenoid Valve. Aluminium bodied. Uniform baking temperature. Minimal outgassing. High corrosion resistance to fluorine gas. Lightweight, Compact. Minimal contamination from heavy metals.

Technical specifications

Attributes
Typexlav-2, aluminium high vacuum angle valve, normally closed/bellows seal with solenoid valve
£ 371.97 excl. VAT
/ Each
£ 446.36 incl. VAT
  • Usually arrives within 14 working days

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