Product details : SMC XLAV-50G-2M9//-5G-Q HIGH VACUUM ANGLE VALVE
High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
Strengths
Single acting, Bellows seal.
With Solenoid Valve.
Aluminium bodied.
Uniform baking temperature.
Minimal outgassing.
High corrosion resistance to fluorine gas.
Lightweight, Compact.
Minimal contamination from heavy metals.
Technical specifications
Attributes
Type
XLAV-2, Aluminium High Vacuum Angle Valve, Normally Closed/Bellows Seal with Solenoid Valve