References
SMC:XLS-16-5D-Q
Rubix:2610541
Documents
Product details : SMC XLS-16-5D-Q HIGH VACUUM ANGLE VALVE
High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
Strengths
Particulates are reduced because there are no sliding metal parts
Pressure balance mechanism allows unrestricted exhaust direction
Can be used in portable equipment since air for drive is not required
A control power supply circuit for solenoid valve drive has been made standard
Technical specifications
Attributes
| Logistic Weight | 420 g |
|---|---|
| Type | high vacuum valve |
Show UNSPSC/ECL@SS
£ 432.34 excl. VAT
/ Each
£ 518.81 incl. VAT
- Delivery usually within ( 19 ) days